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Coventor launches 'virtual fabrication' software

Coventor Inc., a supplier of virtual fabrication solutions for semiconductor devices and micro-electromechanical systems (MEMS), announced the availability of its SEMulator3D 2013 "virtual fabrication" software platform.

SEMulator3D 2013 offers physical accuracy and predictive modeling capabilities to process development and integration, according to the company. The software makes “virtual fabrication” available to the broader semiconductor ecosystem, helping reduce silicon learning cycles and the billions of dollars spent reaching manufacturing readiness, the Cary, N.C.-based company reports.

SEMulator3D 2013 features a new surface evolution engine and seamlessly combines the benefits of advanced physics-driven and high-speed behavioral (voxel) predictive modeling in a single, easy-to-use platform. Voxel modeling is a fast, robust digital approach capable of scaling to the requirements of integrated processes and large silicon areas. Surface evolution is a more analog approach capable of modeling a wide range of physical process behavior.

With SEMulator3D 2013, users can model etching of multi-material stacks with multiple types of etch physics, such as redeposition (passivation), sputtering (physical etching), and etch bias (lateral or chemical etching). They can also model the growth rates of major silicon plane families to predict the faceted shapes and structural ramifications of selective epitaxial growth.

At the core of the new SEMulator3D 2013 platform is a revolutionary physics-driven modeling paradigm for addressing physical process behavior that makes virtual fabrication more predictive and provides new opportunities for replacing actual silicon learning cycles with faster, less costly virtual cycles, according to the company.

Also, virtual metrology innovations and the automation of virtual experiments enable process developers to perform virtual fabrication operations in hours or days instead of the months required for actual silicon learning cycles, the company reports. 

The effect of SEMulator3D 2013 breakthroughs will be showcased with live software demonstrations in Coventor's Booth (#1326) at the 50th Design Automation Conference, June 2-6, 2013, in Austin, Texas., and at a technical presentation by Coventor CTO Dr. David Fried called “Virtual Fabrication: Integrated Process Modeling for Advanced Technology” at SEMICON West, which takes place in San Francisco, Calif., July 9-12, 2013.

More information is available at www.coventor.com.