Direct fabbing of titanium-dioxide microdevices

Aug. 19, 2011—The Optical Society of America has published a research paper about fabricating titanium-dioxide microdevices via laser direct writing and selective etching. Titled “TiO₂ microdevices fabricated by laser direct writing”, the paper was written by researchers at four institutions in China:National Center for Nanoscience and Technology; Institute of Microelectronics, Tsinghua University; Graduate School of the Chinese Academy of Sciences; and State Key Laboratory on Advanced Optical Communication Systems and Networks.

The abstract of the paper appears below. A PDF of the entire paper can be found on the OSA Web site.

Abstract

Constructing micro/nanostructures based on TiO₂ has attracted increasing attention due to the excellent properties of TiO₂. In this study, we report a simple method to directly fabricate TiO₂ microdevices, including Fresnel lens, gear structures and suspended beams only by laser direct writing and selective-etching processing. This route shows great potential in fabricating TiO₂ structures for micro-electro-mechanical systems, diffractive optical elements and bio-applications, owing to its maskless process, low cost, and flexible dry/wet alternative etching treatment.