NanoEDM produces 2.9-μm hole

Sodick’s AE05 Nano EDM can machine a 2.9-μm hole. To make this possible, Sodick had to take some radical steps in terms of EDM design.

The Z-axis motion is completely contact-free. The pneumatic static bearing allows fast, ultraprecise movement in 1nm increments and works in conjunction with the coreless linear motor to ensure rapid response. As with all Sodick linear machines, reports the company, the motors are maintenance-free and deliver zero backlash.

A built-in CCD camera allows easy and precise measurement without changing the setup. The camera is capable of 3,500x magnification, allowing a 1 μm detail to be viewed as a 3.5mm image.